Growth defects and surface roughness in TiN-coated tool steel at various N2 gas flow rates using cathodic arc PVD technique

In the present study, titanium nitride coatings on tool steel were deposited using cathodic arc physical vapour deposition technique. We studied and discussed the effect of various nitrogen gas flow rate on the surface properties of TiN-coated steel. The coating properties investigated in this work...

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Main Authors: Ali, M., Hamzah, E., Qazi, I. A., Toff, M. R. M.
格式: Article
出版: Trans Tech Publications 2010
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在線閱讀:http://eprints.utm.my/id/eprint/26185/
http://dx.doi.org/10.4028/www.scientific.net/MSF.636-637.965
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