Performance analysis of PDMS polymer as a MEMS FPOTF actuator

• Main Authors: Mohammad, Abu Bakar, Ngajikin, Nor Hafizah, Mohd. Kassim, Norazan
• Format: Book Section
• Language: English
• Published: Penerbit UTM 2008
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/25455/1/AbuBakarMohammad2008_PerformanceAnalysisOfPDMSPolymer.pdf; http://eprints.utm.my/id/eprint/25455/; http://www.penerbit.utm.my/bookchapterdoc/FKE/bookchapter_fke38.pdf

The usage of polymer as Micro-electro-mechanical system (MEMS) actuator has received a great intention due to high elasticity characteristic, hence lower the power consumption [1]. Poly-dimethyl siloxane (PDMS) is one of the polymers that widely used in MEMS application. This chapter evaluates the s...