Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer
This paper reports a study of structural properties of hydrogenated amorphous carbon (a-C:H) thin films using infrared (IR) absorption. The samples were prepared on corning glass substrate using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) technique. The deposition time was...
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| Main Authors: | , , , |
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| Format: | Book Section |
| Published: |
Amer Inst Physics
2009
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/13241/ http://dx.doi.org/10.1063/1.3160180 |
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