Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer
This paper reports a study of structural properties of hydrogenated amorphous carbon (a-C:H) thin films using infrared (IR) absorption. The samples were prepared on corning glass substrate using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) technique. The deposition time was...
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my.utm.132412017-10-05T05:17:53Z http://eprints.utm.my/id/eprint/13241/ Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer Abu Bakar, Suriani Ramli, Rosazle Sakrani, Samsudi Mahmood, Mohamad Rusop QC Physics This paper reports a study of structural properties of hydrogenated amorphous carbon (a-C:H) thin films using infrared (IR) absorption. The samples were prepared on corning glass substrate using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) technique. The deposition time was fixed at 5 hours. The infrared absorption was taken in the stretching frequency ranges from 2700-3200cm(-1) to identify the relevant CH bonding. The measured spectrums were observed to be in wavy-like curves associated with sp(m) CH(n) configuration with m, n =1-3. The spectrum showed gradually disappearing with increasing power, w (0.2989-0.4218 W) as the film properties ranges from polymer-like (PAC) to graphite-like (GAC). The curve measured at 0.2989 W indicated marked changes with detectable infrared absorption rates in a-C:H at 2959cm(-1), 2934cm(-1) and 2872cm(-1) (polymer-like structures, PAC). These correspond to the presence of sp(3) CH(3) (symmetric and asymmetric), sp(3) CH(2) (asymmetric) and sp(3) CH. Amer Inst Physics 2009 Book Section PeerReviewed Abu Bakar, Suriani and Ramli, Rosazle and Sakrani, Samsudi and Mahmood, Mohamad Rusop (2009) Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer. In: Nanoscience and Nanotechnology. AIP Conference Proceedings , 1136 . Amer Inst Physics, New York, pp. 437-442. ISBN 978-0-7354-0673-5 http://dx.doi.org/10.1063/1.3160180 doi:10.1063/1.3160180 |
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QC Physics Abu Bakar, Suriani Ramli, Rosazle Sakrani, Samsudi Mahmood, Mohamad Rusop Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer |
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This paper reports a study of structural properties of hydrogenated amorphous carbon (a-C:H) thin films using infrared (IR) absorption. The samples were prepared on corning glass substrate using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) technique. The deposition time was fixed at 5 hours. The infrared absorption was taken in the stretching frequency ranges from 2700-3200cm(-1) to identify the relevant CH bonding. The measured spectrums were observed to be in wavy-like curves associated with sp(m) CH(n) configuration with m, n =1-3. The spectrum showed gradually disappearing with increasing power, w (0.2989-0.4218 W) as the film properties ranges from polymer-like (PAC) to graphite-like (GAC). The curve measured at 0.2989 W indicated marked changes with detectable infrared absorption rates in a-C:H at 2959cm(-1), 2934cm(-1) and 2872cm(-1) (polymer-like structures, PAC). These correspond to the presence of sp(3) CH(3) (symmetric and asymmetric), sp(3) CH(2) (asymmetric) and sp(3) CH.
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Abu Bakar, Suriani Ramli, Rosazle Sakrani, Samsudi Mahmood, Mohamad Rusop |
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Abu Bakar, Suriani Ramli, Rosazle Sakrani, Samsudi Mahmood, Mohamad Rusop |
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Abu Bakar, Suriani |
title |
Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer |
title_short |
Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer |
title_full |
Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer |
title_fullStr |
Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer |
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Bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer |
title_sort |
bonding properties of hydrogenated amorphous carbon thin films characterized by fourier transform infra-red spectrometer |
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Amer Inst Physics |
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2009 |
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http://eprints.utm.my/id/eprint/13241/ http://dx.doi.org/10.1063/1.3160180 |
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