Raman and UV-visible spectrophotometer studies of hydrogenated amorphous carbon thin films
Hydrogenated amorphous carbon (a-C:H) thin films were prepared using a direct-current plasma enhanced chemical vapor deposition (DC-PECVD) over a various range of DC power (w) in range of 0.2989-0.4218 W. Changes in the film properties due to DC-power were systematically studied by Raman spectromete...
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| Main Authors: | , , , |
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| Format: | Book Section |
| Published: |
American Institute of Physics
2009
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/13083/ http://dx.doi.org/10.1063/1.3160181 |
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