Design and analysis of silicon nanowire array based on SAW gas sensor

• Main Authors: Ahmad Asri, Muhammad Izzudin, Hasan, Mohammed Nazibul, Md. Yunos, Yusri, Mohamed Ali, Mohamed Sultan
• Format: Conference or Workshop Item
• Published: 2022
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/100725/; http://dx.doi.org/10.1007/978-981-19-3923-5_53

Estimating the sensitivity of a surface acoustic wave (SAW) gas sensor accurately and effectively is essential for gas sensing applications. In this paper, the sensitivity of a SAW gas sensor without sensitive material, as well as with a sensing layer comprised of silicon and silicon nanowire arrays...