Design and analysis of silicon nanowire array based on SAW gas sensor
Estimating the sensitivity of a surface acoustic wave (SAW) gas sensor accurately and effectively is essential for gas sensing applications. In this paper, the sensitivity of a SAW gas sensor without sensitive material, as well as with a sensing layer comprised of silicon and silicon nanowire arrays...
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my.utm.1007252023-04-30T10:19:57Z http://eprints.utm.my/id/eprint/100725/ Design and analysis of silicon nanowire array based on SAW gas sensor Ahmad Asri, Muhammad Izzudin Hasan, Mohammed Nazibul Md. Yunos, Yusri Mohamed Ali, Mohamed Sultan TK Electrical engineering. Electronics Nuclear engineering Estimating the sensitivity of a surface acoustic wave (SAW) gas sensor accurately and effectively is essential for gas sensing applications. In this paper, the sensitivity of a SAW gas sensor without sensitive material, as well as with a sensing layer comprised of silicon and silicon nanowire arrays (SiNWA), are studied and analyzed via finite element method. Correspondingly, the effect of the length of the sensing material and the gas concentration on the SAW gas sensor sensitivity is being investigated. The proposed SiNWA-based SAW sensor showed high sensitivity at a length of 700 nm, owing to the high surface-to-volume ratio of sensing layer material. Meanwhile, it demonstrated a frequency shift of 270.3 kHz when exposed to a 5000-ppm carbon dioxide gas concentration through the sensing layer. Overall, the SAW gas sensor with SiNWA sensing layer provided significant sensing response. 2022 Conference or Workshop Item PeerReviewed Ahmad Asri, Muhammad Izzudin and Hasan, Mohammed Nazibul and Md. Yunos, Yusri and Mohamed Ali, Mohamed Sultan (2022) Design and analysis of silicon nanowire array based on SAW gas sensor. In: 3rd International Conference on Control, Instrumentation and Mechatronics Engineering, CIM 2022, 2 March 2022 - 3 March 2022, Virtual, Online. http://dx.doi.org/10.1007/978-981-19-3923-5_53 |
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TK Electrical engineering. Electronics Nuclear engineering Ahmad Asri, Muhammad Izzudin Hasan, Mohammed Nazibul Md. Yunos, Yusri Mohamed Ali, Mohamed Sultan Design and analysis of silicon nanowire array based on SAW gas sensor |
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Estimating the sensitivity of a surface acoustic wave (SAW) gas sensor accurately and effectively is essential for gas sensing applications. In this paper, the sensitivity of a SAW gas sensor without sensitive material, as well as with a sensing layer comprised of silicon and silicon nanowire arrays (SiNWA), are studied and analyzed via finite element method. Correspondingly, the effect of the length of the sensing material and the gas concentration on the SAW gas sensor sensitivity is being investigated. The proposed SiNWA-based SAW sensor showed high sensitivity at a length of 700 nm, owing to the high surface-to-volume ratio of sensing layer material. Meanwhile, it demonstrated a frequency shift of 270.3 kHz when exposed to a 5000-ppm carbon dioxide gas concentration through the sensing layer. Overall, the SAW gas sensor with SiNWA sensing layer provided significant sensing response. |
format |
Conference or Workshop Item |
author |
Ahmad Asri, Muhammad Izzudin Hasan, Mohammed Nazibul Md. Yunos, Yusri Mohamed Ali, Mohamed Sultan |
author_facet |
Ahmad Asri, Muhammad Izzudin Hasan, Mohammed Nazibul Md. Yunos, Yusri Mohamed Ali, Mohamed Sultan |
author_sort |
Ahmad Asri, Muhammad Izzudin |
title |
Design and analysis of silicon nanowire array based on SAW gas sensor |
title_short |
Design and analysis of silicon nanowire array based on SAW gas sensor |
title_full |
Design and analysis of silicon nanowire array based on SAW gas sensor |
title_fullStr |
Design and analysis of silicon nanowire array based on SAW gas sensor |
title_full_unstemmed |
Design and analysis of silicon nanowire array based on SAW gas sensor |
title_sort |
design and analysis of silicon nanowire array based on saw gas sensor |
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2022 |
url |
http://eprints.utm.my/id/eprint/100725/ http://dx.doi.org/10.1007/978-981-19-3923-5_53 |
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1765296694267740160 |
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13.160551 |