A Preliminary Study Of Characterization Techniques For Reticle ESD Threshold Voltage Measurement

Recent studies have revealed that reticle robustness towards electrostatic field is reducing since the feature’s critical dimension is getting smaller. Reticle electrostatic damage is seen after the features was subjected at low Electrostatic Discharged (ESD) voltages. This characterization was cond...

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Bibliographic Details
Main Authors: Harriman, Razman, Azmi, Awang Md Isa, W.A.A., W. Razali, Mohamad Kadim, Suaidi, Mohd Shahril Izuan, Mohd Zin
Format: Article
Language:English
Published: Penerbit Universiti, UTeM 2016
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Online Access:http://eprints.utem.edu.my/id/eprint/17069/1/A%20Preliminary%20Study%20Of%20Characterization%20Techniques%20For%20Reticle%20ESD%20Threshold%20Voltage%20Measurement.pdf
http://eprints.utem.edu.my/id/eprint/17069/
http://journal.utem.edu.my/index.php/jtec/article/view/678
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