A Preliminary Study Of Characterization Techniques For Reticle ESD Threshold Voltage Measurement

• Main Authors: Harriman, Razman, Azmi, Awang Md Isa, W.A.A., W. Razali, Mohamad Kadim, Suaidi, Mohd Shahril Izuan, Mohd Zin
• Format: Article
• Language: English
• Published: Penerbit Universiti, UTeM 2016
• Subjects: T Technology (General)
• Online Access: http://eprints.utem.edu.my/id/eprint/17069/1/A%20Preliminary%20Study%20Of%20Characterization%20Techniques%20For%20Reticle%20ESD%20Threshold%20Voltage%20Measurement.pdf; http://eprints.utem.edu.my/id/eprint/17069/; http://journal.utem.edu.my/index.php/jtec/article/view/678

Recent studies have revealed that reticle robustness towards electrostatic field is reducing since the feature’s critical dimension is getting smaller. Reticle electrostatic damage is seen after the features was subjected at low Electrostatic Discharged (ESD) voltages. This characterization was cond...