Finite Element Analysis Of An Actuator In MEMS Application

• Main Author: Ce Ku Zanggi, Che Ku Mohd Arif
• Format: Monograph
• Language: English
• Published: Universiti Sains Malaysia 2005
• Subjects: T Technology; TJ Mechanical engineering and machinery
• Online Access: http://eprints.usm.my/58162/1/Finite%20Element%20Analysis%20Of%20An%20Actuator%20In%20Mems%20Application_Che%20Ku%20Mohd%20Arif%20Ce%20Ku%20Zanggi.pdf; http://eprints.usm.my/58162/

There have many applications in MEMS can be developed by a PZT actuator such as in data storage system, medical and RF system. This project focuses on high density data storage system which the PZT actuator namely microheater was placed. The main function of this microheater in high density da...