Effect Of Tetramethylammonium Hydroxide (TMAH) Etchant On The Formation Of Silicon Nanowires Transistor Patterned By Atomic Force Microscopy (AFM) Lithography
In this research, AFM lithography was performed to create nanoscale oxide pattern of silicon nanowires transistor (SiNWT) structure via local anodic oxidation (LAO) process on silicon on insulator (SOI) surface. These nanoscale oxide patterns will act as a mask to protect silicon layer during etchin...
Saved in:
Main Author: | |
---|---|
Format: | Thesis |
Language: | English |
Published: |
2011
|
Subjects: | |
Online Access: | http://eprints.usm.my/43362/1/LEW%20KAM%20CHUNG.pdf http://eprints.usm.my/43362/ |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!