Investigation of low dielectric constant (k) films for deep sub-micron CMOS application.

• Main Authors: Cheon'g, Kuan Yew, Hussain, Luay Bakir
• Format: Monograph
• Published: Universiti Sains Malaysia 2007
• Subjects: TN1-997 Mining engineering. Metallurgy
• Online Access: http://eprints.usm.my/10419/

Silica (Si02) thin film on Si with low dielectric constant (k) properties has been systematically prepared and investigated. Two types of this low-k material have been deposited on Si via sol-gel spin-on coating. Filem nipis silika (Si02) yang berpemalar dieletrik rendah endap di atas Si tlah dis...