Design and fabrication of silicon nanowire based sensor

This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a starting material, the nanowires is fabricated using a top-down approach which...

Full description

Saved in:
Bibliographic Details
Main Authors: Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Hashim, Uda, Md Nor, M. Nuzaihan
Format: Article
Language:English
English
Published: Electrochemical Science Group 2013
Online Access:http://psasir.upm.edu.my/id/eprint/30181/1/Design%20and%20fabrication%20of%20silicon%20nanowire%20based%20sensor.pdf
http://psasir.upm.edu.my/id/eprint/30181/
http://www.electrochemsci.org/list13.htm#issue9
Tags: Add Tag
No Tags, Be the first to tag this record!
Be the first to leave a comment!
You must be logged in first