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Electrical testing for MEMS's piezoresistive pressure sensor

Piezoresistive pressure sensors were fabricated and tested electrically at MIMOS' foundry. The CMOS integrated circuit processing facilities were used to form the piezoresistive sensor. The electrical testing was done using source measuring unit (SMU) of Agilent 4070 and digital multimeter (DMM...

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Main Authors: Abd Wahab, M.Z.B., Sauli, Z.B., Ahmad, I., Suradi, W.B.
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Published: 2017
Online Access:http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5331
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spelling my.uniten.dspace-53312017-11-15T02:57:34Z Electrical testing for MEMS's piezoresistive pressure sensor Abd Wahab, M.Z.B. Sauli, Z.B. Ahmad, I. Suradi, W.B. Piezoresistive pressure sensors were fabricated and tested electrically at MIMOS' foundry. The CMOS integrated circuit processing facilities were used to form the piezoresistive sensor. The electrical testing was done using source measuring unit (SMU) of Agilent 4070 and digital multimeter (DMM) of Agilent 3458A. The result showed that 97.6% of the dies or devices out of 2306 in a wafer meet the targeted specification. Therefore we could conclude that the fabrication of piezoresistive pressure sensors at MIMOS's foundry is very reliable. © 2003 IEEE. 2017-11-15T02:57:34Z 2017-11-15T02:57:34Z 2003 http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5331
institution Universiti Tenaga Nasional
building UNITEN Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Tenaga Nasional
content_source UNITEN Institutional Repository
url_provider http://dspace.uniten.edu.my/
description Piezoresistive pressure sensors were fabricated and tested electrically at MIMOS' foundry. The CMOS integrated circuit processing facilities were used to form the piezoresistive sensor. The electrical testing was done using source measuring unit (SMU) of Agilent 4070 and digital multimeter (DMM) of Agilent 3458A. The result showed that 97.6% of the dies or devices out of 2306 in a wafer meet the targeted specification. Therefore we could conclude that the fabrication of piezoresistive pressure sensors at MIMOS's foundry is very reliable. © 2003 IEEE.
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author Abd Wahab, M.Z.B.
Sauli, Z.B.
Ahmad, I.
Suradi, W.B.
spellingShingle Abd Wahab, M.Z.B.
Sauli, Z.B.
Ahmad, I.
Suradi, W.B.
Electrical testing for MEMS's piezoresistive pressure sensor
author_facet Abd Wahab, M.Z.B.
Sauli, Z.B.
Ahmad, I.
Suradi, W.B.
author_sort Abd Wahab, M.Z.B.
title Electrical testing for MEMS's piezoresistive pressure sensor
title_short Electrical testing for MEMS's piezoresistive pressure sensor
title_full Electrical testing for MEMS's piezoresistive pressure sensor
title_fullStr Electrical testing for MEMS's piezoresistive pressure sensor
title_full_unstemmed Electrical testing for MEMS's piezoresistive pressure sensor
title_sort electrical testing for mems's piezoresistive pressure sensor
publishDate 2017
url http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5331
_version_ 1644493659749482496
score 13.214268

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