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Fabrication of platinum membrane on silicon for MEMS microphone

Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 μm are successfull...

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Main Authors: Hamzah, A.A., Majlis, B.Y., Ahmad, I.
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Published: 2017
Online Access:http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5299
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spelling my.uniten.dspace-52992017-11-15T02:57:23Z Fabrication of platinum membrane on silicon for MEMS microphone Hamzah, A.A. Majlis, B.Y. Ahmad, I. Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 μm are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using Tencor surface profiler. It is observed that deflection at its center is proportional to applied pressure for pressure between 20 Pa to 200 Pa. Average center deflection for applied pressure of 200 Pa is measured to be 0.41 μm. The fabricated platinum membrane is deemed suitable for MEMS microphone application due to its linear deflection response in acoustic pressure range. ©2006 IEEE. 2017-11-15T02:57:23Z 2017-11-15T02:57:23Z 2006 http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5299
institution Universiti Tenaga Nasional
building UNITEN Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Tenaga Nasional
content_source UNITEN Institutional Repository
url_provider http://dspace.uniten.edu.my/
description Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 μm are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using Tencor surface profiler. It is observed that deflection at its center is proportional to applied pressure for pressure between 20 Pa to 200 Pa. Average center deflection for applied pressure of 200 Pa is measured to be 0.41 μm. The fabricated platinum membrane is deemed suitable for MEMS microphone application due to its linear deflection response in acoustic pressure range. ©2006 IEEE.
format
author Hamzah, A.A.
Majlis, B.Y.
Ahmad, I.
spellingShingle Hamzah, A.A.
Majlis, B.Y.
Ahmad, I.
Fabrication of platinum membrane on silicon for MEMS microphone
author_facet Hamzah, A.A.
Majlis, B.Y.
Ahmad, I.
author_sort Hamzah, A.A.
title Fabrication of platinum membrane on silicon for MEMS microphone
title_short Fabrication of platinum membrane on silicon for MEMS microphone
title_full Fabrication of platinum membrane on silicon for MEMS microphone
title_fullStr Fabrication of platinum membrane on silicon for MEMS microphone
title_full_unstemmed Fabrication of platinum membrane on silicon for MEMS microphone
title_sort fabrication of platinum membrane on silicon for mems microphone
publishDate 2017
url http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5299
_version_ 1644493650032328704
score 13.214268

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