Analysis of threshold voltage variance in 45nm n-channel device using L27 orthogonal array method

In this research, orthogonal array of L27 in Taguchi Method was used to optimize the process parameters (control factors) variation in 45nm n-channel device with considering the interaction effect. The signal-to-noise (S/N) ratio and analysis of variance (ANOVA) are employed to study the performance...

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Bibliographic Details
Main Authors: Salehuddin, F., Mohd Zain, A.S., Idris, N.M., Mat Yamin, A.K., Abdul Hamid, A.M., Ahmad, I., Menon, P.S.
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Published: 2017
Online Access:http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5201
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