Analysis of threshold voltage variance in 45nm n-channel device using L27 orthogonal array method
In this research, orthogonal array of L27 in Taguchi Method was used to optimize the process parameters (control factors) variation in 45nm n-channel device with considering the interaction effect. The signal-to-noise (S/N) ratio and analysis of variance (ANOVA) are employed to study the performance...
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Conference Paper |
| Published: |
2023
|
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|