Simulation of a MEMS piezoelectric energy harvester

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The des...

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Main Authors: Md Ralib A.A., Nurashikin Nordin A., Salleh H.
Other Authors: 36537608500
Format: Conference paper
Published: 2023
Subjects:
ZnO
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spelling my.uniten.dspace-305542023-12-29T15:49:24Z Simulation of a MEMS piezoelectric energy harvester Md Ralib A.A. Nurashikin Nordin A. Salleh H. 36537608500 7005958999 24067645400 Cantilever beam Energy harvesting Interdigitated electrodes Piezoelectric Atomic force microscopy Cantilever beams Design Electrodes Harvesters Nanocantilevers Piezoelectricity Pile foundations Platinum Resonance Zinc oxide At resonance Conventional batteries CoventorWare Design and simulation Energy Harvester Environmental-friendly Finite element simulations Growing demand Inter-digitated electrodes Long lasting Optimum dimensions Output voltages Piezoelectric Piezoelectric cantilever beams Piezoelectric energy Piezoelectric layers Portable electronic devices Pt electrode Silicon substrates ZnO Energy harvesting The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare� to obtain the device at resonance frequency, output voltage and optimum dimensions. � 2010 EDA Publishing/DTIP. Final 2023-12-29T07:49:23Z 2023-12-29T07:49:23Z 2010 Conference paper 2-s2.0-77957855178 https://www.scopus.com/inward/record.uri?eid=2-s2.0-77957855178&partnerID=40&md5=52c6285363c04b5b9aca850db03746fb https://irepository.uniten.edu.my/handle/123456789/30554 5486470 177 181 Scopus
institution Universiti Tenaga Nasional
building UNITEN Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Tenaga Nasional
content_source UNITEN Institutional Repository
url_provider http://dspace.uniten.edu.my/
topic Cantilever beam
Energy harvesting
Interdigitated electrodes
Piezoelectric
Atomic force microscopy
Cantilever beams
Design
Electrodes
Harvesters
Nanocantilevers
Piezoelectricity
Pile foundations
Platinum
Resonance
Zinc oxide
At resonance
Conventional batteries
CoventorWare
Design and simulation
Energy Harvester
Environmental-friendly
Finite element simulations
Growing demand
Inter-digitated electrodes
Long lasting
Optimum dimensions
Output voltages
Piezoelectric
Piezoelectric cantilever beams
Piezoelectric energy
Piezoelectric layers
Portable electronic devices
Pt electrode
Silicon substrates
ZnO
Energy harvesting
spellingShingle Cantilever beam
Energy harvesting
Interdigitated electrodes
Piezoelectric
Atomic force microscopy
Cantilever beams
Design
Electrodes
Harvesters
Nanocantilevers
Piezoelectricity
Pile foundations
Platinum
Resonance
Zinc oxide
At resonance
Conventional batteries
CoventorWare
Design and simulation
Energy Harvester
Environmental-friendly
Finite element simulations
Growing demand
Inter-digitated electrodes
Long lasting
Optimum dimensions
Output voltages
Piezoelectric
Piezoelectric cantilever beams
Piezoelectric energy
Piezoelectric layers
Portable electronic devices
Pt electrode
Silicon substrates
ZnO
Energy harvesting
Md Ralib A.A.
Nurashikin Nordin A.
Salleh H.
Simulation of a MEMS piezoelectric energy harvester
description The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare� to obtain the device at resonance frequency, output voltage and optimum dimensions. � 2010 EDA Publishing/DTIP.
author2 36537608500
author_facet 36537608500
Md Ralib A.A.
Nurashikin Nordin A.
Salleh H.
format Conference paper
author Md Ralib A.A.
Nurashikin Nordin A.
Salleh H.
author_sort Md Ralib A.A.
title Simulation of a MEMS piezoelectric energy harvester
title_short Simulation of a MEMS piezoelectric energy harvester
title_full Simulation of a MEMS piezoelectric energy harvester
title_fullStr Simulation of a MEMS piezoelectric energy harvester
title_full_unstemmed Simulation of a MEMS piezoelectric energy harvester
title_sort simulation of a mems piezoelectric energy harvester
publishDate 2023
_version_ 1806427661849853952
score 13.222552