Theoretical modeling and simulation of MEMS piezoelectric energy harvester

• Main Authors: Md Ralib A.A., Nordin A.N., Salleh H.
• Other Authors: 36537608500
• Format: Conference paper
• Published: 2023
• Subjects: Cantilever beam; Energy harvesting; Piezoelectric; Atomic force microscopy; Cantilever beams; Computer simulation; Harvesters; Harvesting; Nanocantilevers; Nickel oxide; Piezoelectric devices; Piezoelectricity; Pile foundations; Renewable energy resources; Zinc oxide; CoventorWare; Design and simulation; Electrical power; Energy Harvester; Energy harvesting device; Finite element simulations; Inter-digitated electrodes; Piezoelectric cantilever beams; Piezoelectric energy; Piezoelectric layers; Proof mass; Renewable energies; Theoretical modeling; Vibration frequency

Energy harvesting devices, capable of converting wasted ambient energy to electrical power are rapidly gaining popularity as a source of green and renewable energy. This work presents the design and simulation of MEMS based piezoelectric cantilever beam which can both harvest energy as well as monit...