Simulation of a MEMS piezoelectric energy harvester

• Main Authors: Md Ralib A.A., Nurashikin Nordin A., Salleh H.
• Other Authors: 36537608500
• Format: Conference paper
• Published: 2023
• Subjects: Cantilever beam; Energy harvesting; Interdigitated electrodes; Piezoelectric; Atomic force microscopy; Cantilever beams; Design; Electrodes; Harvesters; Nanocantilevers; Piezoelectricity; Pile foundations; Platinum; Resonance; Zinc oxide; At resonance; Conventional batteries; CoventorWare; Design and simulation; Energy Harvester; Environmental-friendly; Finite element simulations; Growing demand; Inter-digitated electrodes; Long lasting; Optimum dimensions; Output voltages; Piezoelectric cantilever beams; Piezoelectric energy; Piezoelectric layers; Portable electronic devices; Pt electrode; Silicon substrates; ZnO

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare� to obtain the device at resonance frequency, output voltage and optimum dimensions. � 2010 EDA Publishing/DTIP.