Effects of anodisation parameters on thin film properties: a review
CMOS integrated circuits; Metallic compounds; Metals; MOS devices; Oxide semiconductors; Temperature; Thin films; Anodisation; Anodising; Applied voltages; Complementary metal oxide semiconductors; Metal oxide film; Nano-structured; Thickness; Thin-film properties; Oxide films
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Review |
| Published: |
Taylor and Francis Ltd.
2023
|
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | CMOS integrated circuits; Metallic compounds; Metals; MOS devices; Oxide semiconductors; Temperature; Thin films; Anodisation; Anodising; Applied voltages; Complementary metal oxide semiconductors; Metal oxide film; Nano-structured; Thickness; Thin-film properties; Oxide films |
|---|