Analysis of threshold voltage variance in 45nm n-channel device using L27 orthogonal array method
In this research, orthogonal array of L27 in Taguchi Method was used to optimize the process parameters (control factors) variation in 45nm n-channel device with considering the interaction effect. The signal-to-noise (S/N) ratio and analysis of variance (ANOVA) are employed to study the performance...
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| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Published: |
2023
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