A silicon-oxide-silicon vertically separated electrode nanogap device structure

• Main Authors: Noor, N. H. M., Uda, Hashim, Prof. Dr., Muhamad Emi Azry, Shohini, Nuri, A. M. M.
• Format: Working Paper
• Language: English
• Published: American Institute of Physics 2010
• Subjects: Capacitance; Nanofabrication; Nanogap; Silicon contacts; International Conference on Nanoscience and Nanotechnology 2008
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/8824

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