Effect of thermal processes on Al thin film in the present of nitrogen (N2) gas

• Main Authors: Riyaz Ahmad, Mohamed Ali, Ahmad Nasrull, Mohamed, Nafarizal, Nayan
• Format: Working Paper
• Language: English
• Published: Universiti Malaysia Pahang 2010
• Subjects: Aluminum thin film; Aluminum Nitride; Nitrogen Gas Furnace,; Scanning Electron Microscope (SEM); X- ray diffraction (XRD); Malaysian Technical Universities Conference on Engineering and Technology (MUCEET)
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/8658

Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, P...