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Effect of thermal processes on Al thin film in the present of nitrogen (N2) gas

Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, P...

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Bibliographic Details
Main Authors: Riyaz Ahmad, Mohamed Ali, Ahmad Nasrull, Mohamed, Nafarizal, Nayan
Format: Working Paper
Language:English
Published: Universiti Malaysia Pahang 2010
Subjects:
Aluminum thin film
Aluminum Nitride
Nitrogen Gas Furnace,
Scanning Electron Microscope (SEM)
X- ray diffraction (XRD)
Malaysian Technical Universities Conference on Engineering and Technology (MUCEET)
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/8658
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Summary:Malaysian Technical Universities Conference on Engineering and Technology organized by Universiti Malaysia Pahang in collaboration with Universiti Tun Hussein Onn Malaysia, Universiti Teknikal Malaysia Melaka & Universiti Malaysia Perlis on June 20th - 22nd, 2009, at MS Garden Hotel, Kuantan, Pahang, Malaysia.

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