Techniques in Integrated Circuit (IC) failure analysis
Organized by ELectron Microscopy Society of Malaysia (EMSM), 13th - 15th December 2004 at Palm Garden Hotel, Putrajaya.
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ELectron Microscopy Society of Malaysia (EMSM)
2009
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my.unimap-63622009-07-08T08:36:36Z Techniques in Integrated Circuit (IC) failure analysis Zul Azhar, Zahid Jamal, Assoc. Prof. Dr. Sanna, Taking Failure analysis Integrated circuits Microelectronics Reliability (Engineering) Organized by ELectron Microscopy Society of Malaysia (EMSM), 13th - 15th December 2004 at Palm Garden Hotel, Putrajaya. Failure analysis (FA) plays an important role in the development and manufacturing of integrated circuits. It provides necessary information for technology advancement and for corrective action to improve quality and reliability. In this paper the commonly used techniques in integrated circuits failure analysis are discussed. The paper also describes the basic FA flow consists of fault localization, deprocessing, defect localisation and inspection characterisation. 2009-07-08T08:36:36Z 2009-07-08T08:36:36Z 2004-12-13 Working Paper p.1-6 http://hdl.handle.net/123456789/6362 en 13th Scientific Conference ELectron Microscopy Society of Malaysia (EMSM) ELectron Microscopy Society of Malaysia (EMSM) |
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Failure analysis Integrated circuits Microelectronics Reliability (Engineering) |
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Failure analysis Integrated circuits Microelectronics Reliability (Engineering) Zul Azhar, Zahid Jamal, Assoc. Prof. Dr. Sanna, Taking Techniques in Integrated Circuit (IC) failure analysis |
description |
Organized by ELectron Microscopy Society of Malaysia (EMSM), 13th - 15th December 2004 at Palm Garden Hotel, Putrajaya. |
format |
Working Paper |
author |
Zul Azhar, Zahid Jamal, Assoc. Prof. Dr. Sanna, Taking |
author_facet |
Zul Azhar, Zahid Jamal, Assoc. Prof. Dr. Sanna, Taking |
author_sort |
Zul Azhar, Zahid Jamal, Assoc. Prof. Dr. |
title |
Techniques in Integrated Circuit (IC) failure analysis |
title_short |
Techniques in Integrated Circuit (IC) failure analysis |
title_full |
Techniques in Integrated Circuit (IC) failure analysis |
title_fullStr |
Techniques in Integrated Circuit (IC) failure analysis |
title_full_unstemmed |
Techniques in Integrated Circuit (IC) failure analysis |
title_sort |
techniques in integrated circuit (ic) failure analysis |
publisher |
ELectron Microscopy Society of Malaysia (EMSM) |
publishDate |
2009 |
url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/6362 |
_version_ |
1643788406770106368 |
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13.214268 |