Holdings: Improvement in processing of micro and nano structure fabrication using O₂ plasma

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Bibliographic Details
Main Authors:	Ahmed, N. M., Dhahi, Th Sabar, Uda, Hashim
Other Authors:	sthikra@yahoo.com.
Format:	Article
Language:	English
Published:	Universiti Malaysia Perlis 2016
Subjects:	Plasma Etching Photolithography Nanogap Electrodes
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41229
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