Description: Design and fabrication of silicon nanowire based sensor

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Bibliographic Details
Main Authors:	Siti Fatimah, Abd Rahman, Nor Azah, Yusof, Prof. Dr., Uda, Hashim, Prof. Dr., Mohammad Nuzaihan, Md Nor
Other Authors:	azahy@upm.edu.my
Format:	Article
Language:	English
Published:	Electrochemical Science Group (ESG) 2014
Subjects:	Electron beam lithography Ph detection Resistivity Silicon nanowire
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/34976
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Summary:	Link to publisher's homepage at http://www.electrochemsci.org/