Cover Image

Mask design platform for zinc oxide nanowire growth

Link to publisher's homepage at http://www.ttp.net/

Saved in:
Bibliographic Details
Main Authors: Rajintra Prasat, Haarindra Prasat, Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa
Other Authors: haarindraprasad@yahoo.com
Format: Article
Language:English
Published: Trans Tech Publications 2014
Subjects:
AutoCAD
Mask design
Nanowire
Pattern transfer
Platform
VLS mechanism
Online Access:http://dspace.unimap.edu.my:80/dspace/handle/123456789/33123
Tags: Add Tag
No Tags, Be the first to tag this record!
id my.unimap-33123
record_format dspace
spelling my.unimap-331232014-03-26T01:43:36Z Mask design platform for zinc oxide nanowire growth Rajintra Prasat, Haarindra Prasat Uda, Hashim, Prof. Dr. Tijjani Adam, Shuwa haarindraprasad@yahoo.com uda@unimap.edu.my tijjaniadam@yahoo.com.my AutoCAD Mask design Nanowire Pattern transfer Platform VLS mechanism Link to publisher's homepage at http://www.ttp.net/ This paper mainly represent the simple and effective method to design the chrome mask for patterning the platform for zinc oxide nanowire growth. The most essential aspect that need to be considered in designing the chrome mask is the critical dimension of the mask. Hence, the mask is design by using AutoCAD software to design the desired size and length dimension of the mask. Fabrication and development of zinc oxide consist of a series of major steps. The silicon sample will be initially cleaned, followed by zinc oxide deposition and the zinc oxide nanowire will be growth in vertical direction by using VLS (Vapor-Liquid-Solid) mechanism. The nanowire will be patterned by using the chrome mask which design the platform of the nanowire formation. The initial design of the chrome mask is measured and compared to the fabricated chrome mask to detect the efficiency and the accuracy of the pattern transfer process. Our aim is to develop a comprehensive platform for prominent zinc oxide nanowire growth leading to novel and efficient functional of zinc oxide nanowire devices. 2014-03-26T01:43:36Z 2014-03-26T01:43:36Z 2013 Article Advanced Materials Research, vol. 795, 2013, pages 393-396 978-303785811-0 1022-6680 http://www.scientific.net/AMR.795.393 http://dspace.unimap.edu.my:80/dspace/handle/123456789/33123 en Trans Tech Publications
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic AutoCAD
Mask design
Nanowire
Pattern transfer
Platform
VLS mechanism
spellingShingle AutoCAD
Mask design
Nanowire
Pattern transfer
Platform
VLS mechanism
Rajintra Prasat, Haarindra Prasat
Uda, Hashim, Prof. Dr.
Tijjani Adam, Shuwa
Mask design platform for zinc oxide nanowire growth
description Link to publisher's homepage at http://www.ttp.net/
author2 haarindraprasad@yahoo.com
author_facet haarindraprasad@yahoo.com
Rajintra Prasat, Haarindra Prasat
Uda, Hashim, Prof. Dr.
Tijjani Adam, Shuwa
format Article
author Rajintra Prasat, Haarindra Prasat
Uda, Hashim, Prof. Dr.
Tijjani Adam, Shuwa
author_sort Rajintra Prasat, Haarindra Prasat
title Mask design platform for zinc oxide nanowire growth
title_short Mask design platform for zinc oxide nanowire growth
title_full Mask design platform for zinc oxide nanowire growth
title_fullStr Mask design platform for zinc oxide nanowire growth
title_full_unstemmed Mask design platform for zinc oxide nanowire growth
title_sort mask design platform for zinc oxide nanowire growth
publisher Trans Tech Publications
publishDate 2014
url http://dspace.unimap.edu.my:80/dspace/handle/123456789/33123
_version_ 1643797075087851520
score 13.23648

Similar Items