Shallow junction formation: A simulation based study of thermal diffusion by spin-on-dopants technique

• Main Authors: Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa, Nik Hazura, Nik Hamat, Siti Fatimah
• 其他作者: [e-mail]
• 格式: Article
• 语言: English
• 出版: AENSI Publications 2013
• 主题: Ultra shallow junction; Simulation; TSUPREM-4; Thermal diffusion; Semiconductor
• 在线阅读: http://dspace.unimap.edu.my/xmlui/handle/123456789/26528

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