Description: Shallow junction formation: A simulation based study of thermal diffusion by spin-on-dopants technique

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Bibliographic Details
Main Authors:	Uda, Hashim, Prof. Dr., Tijjani Adam, Shuwa, Nik Hazura, Nik Hamat, Siti Fatimah
Other Authors:	uda@unimap.edu.my
Format:	Article
Language:	English
Published:	AENSI Publications 2013
Subjects:	Ultra shallow junction Simulation TSUPREM-4 Thermal diffusion Semiconductor
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/26528
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Summary:	Link to publisher's homepage at http://www.aensiweb.com/jasr.html