Polysilicon nanogap fabrication using a thermal oxidation process

• Main Authors: Dhahi, T.S, Uda, Hashim, Prof. Dr., Md. Eaqub, Ali, Nazwa, Taib
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: Emerald Group Publishing Limited. 2013
• Subjects: Capacitance; Electrodes; Microelectronics; Nanogap; Nanotechnology; Photolithography; Physical characterization; Size reduction
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/25642

Link to publisher's homepage at http://www.emeraldinsight.com/