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Simulasi Fabrikasi Simpangan Cetek Ultra menggunakan Resapan Dopan daripada SOD (Spin On Dopant)

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Bibliographic Details
Main Authors:	Uda, Hashim, Nik Hazura, Nik Hamat, Fauziyah, Salehuddin, Ibrahim, Ahmad, Sutikno Madnasri
Format:	Article
Language:	other
Published:	Universiti Malaysia Perlis 2008
Subjects:	Simpangan cetek ultra T-SUPREM4 Spin On Dopant (SOD) Resapan ULSI Semiconductors Semiconductors > Materials Integrated circuits > Design and construction
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/2178
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