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Vertical-Lateral Thermal Actuator for MEMS design

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Bibliographic Details
Main Author:	Muhammad Arefendy Ab. Rahim
Other Authors:	Hafiz Ismail (Advisor)
Format:	Learning Object
Language:	English
Published:	Universiti Malaysia Perlis 2008
Subjects:	Actuators Microelectromechanical systems Microelectronics Sensors Microelectromechanical systems > Design and construction
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/1999
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id	my.unimap-1999
record_format	dspace
spelling	my.unimap-19992008-09-09T02:32:57Z Vertical-Lateral Thermal Actuator for MEMS design Muhammad Arefendy Ab. Rahim Hafiz Ismail (Advisor) Actuators Microelectromechanical systems Microelectronics Sensors Microelectromechanical systems -- Design and construction Access is limited to UniMAP community. Compact vertical and lateral thermal actuator has been design and simulation. The process of the simulation is to apply the current so it can make the arms hot enough to bend the design towards the cold arms. This current apply is called joule’s heating law that explain the material can produce thermal energy by applying a current through it. The simulation is done for various dimensions of thickness, width, and length to analyze it potential for greater deflection. The vertical lateral thermal actuator has the same value of deflection as the traditional actuator deflection and that’s mean the vertical lateral actuator can be more deflection than the traditional actuator. The way of deflection for this vertical lateral thermal actuator can be bidirectional according where the voltage applied to flow the current. The bidirectional can be vertical or lateral deflection. 2008-09-09T02:32:57Z 2008-09-09T02:32:57Z 2008-04 Learning Object http://hdl.handle.net/123456789/1999 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution	Universiti Malaysia Perlis
building	UniMAP Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Malaysia Perlis
content_source	UniMAP Library Digital Repository
url_provider	http://dspace.unimap.edu.my/
language	English
topic	Actuators Microelectromechanical systems Microelectronics Sensors Microelectromechanical systems -- Design and construction
spellingShingle	Actuators Microelectromechanical systems Microelectronics Sensors Microelectromechanical systems -- Design and construction Muhammad Arefendy Ab. Rahim Vertical-Lateral Thermal Actuator for MEMS design
description	Access is limited to UniMAP community.
author2	Hafiz Ismail (Advisor)
author_facet	Hafiz Ismail (Advisor) Muhammad Arefendy Ab. Rahim
format	Learning Object
author	Muhammad Arefendy Ab. Rahim
author_sort	Muhammad Arefendy Ab. Rahim
title	Vertical-Lateral Thermal Actuator for MEMS design
title_short	Vertical-Lateral Thermal Actuator for MEMS design
title_full	Vertical-Lateral Thermal Actuator for MEMS design
title_fullStr	Vertical-Lateral Thermal Actuator for MEMS design
title_full_unstemmed	Vertical-Lateral Thermal Actuator for MEMS design
title_sort	vertical-lateral thermal actuator for mems design
publisher	Universiti Malaysia Perlis
publishDate	2008
url	http://dspace.unimap.edu.my/xmlui/handle/123456789/1999
_version_	1643787518547591168
score	13.214268

Vertical-Lateral Thermal Actuator for MEMS design

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