Description: Vertical-Lateral Thermal Actuator for MEMS design

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Bibliographic Details
Main Author:	Muhammad Arefendy Ab. Rahim
Other Authors:	Hafiz Ismail (Advisor)
Format:	Learning Object
Language:	English
Published:	Universiti Malaysia Perlis 2008
Subjects:	Actuators Microelectromechanical systems Microelectronics Sensors Microelectromechanical systems > Design and construction
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/1999
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Summary:	Access is limited to UniMAP community.