Analysis of square shaped Microstructure based Electron Beam induced deposition
The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly onto the sample substrate. Without using the precursor gas, the square shaped s...
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| 格式: | Learning Object |
| 语言: | English |
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Universiti Malaysia Perlis
2008
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| 在线阅读: | http://dspace.unimap.edu.my/xmlui/handle/123456789/1968 |
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