Analysis of square shaped Microstructure based Electron Beam induced deposition

• Main Author: Siti Fatimah Abd. Rahman
• Other Authors: Shaiful Nizam Mohyar (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Electron beams; Scanning electron microscopes; Microelectronics; Microstructure
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1968

The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly onto the sample substrate. Without using the precursor gas, the square shaped s...