Electrical studies of annealing effect in BST thin film with different doping concentration of indium (III) oxide
Organized by Institute of Electrical and Electronics Engineers (IEEE) in collaboration with Electron Device Society (EDS) and Universiti Kebangsaan Malaysia (UKM), 10th - 12th August 2009 at Renaissance Hotel, Kota Bahru, Kelantan, Malaysia,
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Institute of Electrical and Electronics Engineers (IEEE)
2011
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my.unimap-171072011-12-09T02:32:49Z Electrical studies of annealing effect in BST thin film with different doping concentration of indium (III) oxide Nurjuliana, Juhari Norzahiyah, Nordin Noraini, Othman nurjuliana@unimap.edu.my Barium Strontium Titanate (BST) thin film Indium (III) oxide Barium Indium Strontium Titanate (BIST) thin film Organized by Institute of Electrical and Electronics Engineers (IEEE) in collaboration with Electron Device Society (EDS) and Universiti Kebangsaan Malaysia (UKM), 10th - 12th August 2009 at Renaissance Hotel, Kota Bahru, Kelantan, Malaysia, Ferroelectric Barium Strontium Titanate (BST) and doped with Indium (BIST) thin films are deposited using spin coating technique with spinning speed at 4000 rpm for 30 seconds. The percentage of Indium is varied with 2% and 10%. The post deposition annealing of the films are carried out at different temperature namely 700°C, 850°C and 950°C for a period of one day. At annealing temperature of 850°C for BIST 2% and 10% indicates that the current gives highest value when the forward bias voltage is applied for IV characteristics. Combination with lowest dopant concentration made BIST 2% can be classified into light dependent device. CV measurement for BIST 10% gives the higher result of capacitance value. 2011-12-09T02:32:49Z 2011-12-09T02:32:49Z 2009-08-12 Article 978-967-5048-55-5 http://hdl.handle.net/123456789/17107 en Proceedings of the IEEE Regional Symposium on Micro and Nano Electronics (IEEE-RSM09) Institute of Electrical and Electronics Engineers (IEEE) |
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Barium Strontium Titanate (BST) thin film Indium (III) oxide Barium Indium Strontium Titanate (BIST) thin film |
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Barium Strontium Titanate (BST) thin film Indium (III) oxide Barium Indium Strontium Titanate (BIST) thin film Nurjuliana, Juhari Norzahiyah, Nordin Noraini, Othman Electrical studies of annealing effect in BST thin film with different doping concentration of indium (III) oxide |
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Organized by Institute of Electrical and Electronics Engineers (IEEE) in collaboration with Electron Device Society (EDS) and Universiti Kebangsaan Malaysia (UKM), 10th - 12th August 2009 at Renaissance Hotel, Kota Bahru, Kelantan, Malaysia, |
author2 |
nurjuliana@unimap.edu.my |
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nurjuliana@unimap.edu.my Nurjuliana, Juhari Norzahiyah, Nordin Noraini, Othman |
format |
Article |
author |
Nurjuliana, Juhari Norzahiyah, Nordin Noraini, Othman |
author_sort |
Nurjuliana, Juhari |
title |
Electrical studies of annealing effect in BST thin film with different doping concentration of indium (III) oxide |
title_short |
Electrical studies of annealing effect in BST thin film with different doping concentration of indium (III) oxide |
title_full |
Electrical studies of annealing effect in BST thin film with different doping concentration of indium (III) oxide |
title_fullStr |
Electrical studies of annealing effect in BST thin film with different doping concentration of indium (III) oxide |
title_full_unstemmed |
Electrical studies of annealing effect in BST thin film with different doping concentration of indium (III) oxide |
title_sort |
electrical studies of annealing effect in bst thin film with different doping concentration of indium (iii) oxide |
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Institute of Electrical and Electronics Engineers (IEEE) |
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2011 |
url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/17107 |
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