Fabrication and characterization of microfluidic field effect transistor on silicon substrate
The development of a silicon-based microfluidic field effect transistor has been carried out. The main objective of this study is to present from concept, the design of a microfluidic FET and to develop its appropriate process flow in fabricating the microfluidic FET on silicon wafer, which will...
保存先:
| 第一著者: | |
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| フォーマット: | 学位論文 |
| 言語: | English |
| 出版事項: |
Universiti Malaysia Perlis
2011
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| 主題: | |
| オンライン･アクセス: | http://dspace.unimap.edu.my/xmlui/handle/123456789/12923 |
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