Virtual Laser-micromachining of MEMS Components
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Academy Publisher
2009
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| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/5418/1/Virtual%20Laser-micromachining%20of%20MEMS1.pdf http://umpir.ump.edu.my/id/eprint/5418/ http://www.academypublisher.com/ijrte/vol01/no05/ijrte0105105109.pdf |
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