Virtual Laser-micromachining of MEMS Components
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| Language: | English |
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Academy Publisher
2009
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| Online Access: | http://umpir.ump.edu.my/id/eprint/5418/1/Virtual%20Laser-micromachining%20of%20MEMS1.pdf http://umpir.ump.edu.my/id/eprint/5418/ http://www.academypublisher.com/ijrte/vol01/no05/ijrte0105105109.pdf |
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my.ump.umpir.54182018-11-14T01:29:12Z http://umpir.ump.edu.my/id/eprint/5418/ Virtual Laser-micromachining of MEMS Components M. F. F., Ab Rashid M. R. M., Rejab Mon, Daw T.T N. S. M., Shalahim Mohd Fazli, Ismail TJ Mechanical engineering and machinery Academy Publisher 2009 Article PeerReviewed pdf en http://umpir.ump.edu.my/id/eprint/5418/1/Virtual%20Laser-micromachining%20of%20MEMS1.pdf M. F. F., Ab Rashid and M. R. M., Rejab and Mon, Daw T.T and N. S. M., Shalahim and Mohd Fazli, Ismail (2009) Virtual Laser-micromachining of MEMS Components. International Journal of Recent Trends in Engineering, 1 (5). pp. 105-109. ISSN 1797-9617 http://www.academypublisher.com/ijrte/vol01/no05/ijrte0105105109.pdf |
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Universiti Malaysia Pahang |
| content_source |
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http://umpir.ump.edu.my/ |
| language |
English |
| topic |
TJ Mechanical engineering and machinery |
| spellingShingle |
TJ Mechanical engineering and machinery M. F. F., Ab Rashid M. R. M., Rejab Mon, Daw T.T N. S. M., Shalahim Mohd Fazli, Ismail Virtual Laser-micromachining of MEMS Components |
| format |
Article |
| author |
M. F. F., Ab Rashid M. R. M., Rejab Mon, Daw T.T N. S. M., Shalahim Mohd Fazli, Ismail |
| author_facet |
M. F. F., Ab Rashid M. R. M., Rejab Mon, Daw T.T N. S. M., Shalahim Mohd Fazli, Ismail |
| author_sort |
M. F. F., Ab Rashid |
| title |
Virtual Laser-micromachining of MEMS Components |
| title_short |
Virtual Laser-micromachining of MEMS Components |
| title_full |
Virtual Laser-micromachining of MEMS Components |
| title_fullStr |
Virtual Laser-micromachining of MEMS Components |
| title_full_unstemmed |
Virtual Laser-micromachining of MEMS Components |
| title_sort |
virtual laser-micromachining of mems components |
| publisher |
Academy Publisher |
| publishDate |
2009 |
| url |
http://umpir.ump.edu.my/id/eprint/5418/1/Virtual%20Laser-micromachining%20of%20MEMS1.pdf http://umpir.ump.edu.my/id/eprint/5418/ http://www.academypublisher.com/ijrte/vol01/no05/ijrte0105105109.pdf |
| _version_ |
1643665194363125760 |
| score |
13.18916 |