Physical vapour deposition of Zr-based nano films on various substrates: A review

• Main Authors: Tarek, Ahmad Hafiz Jafarul, Lai, Chin Wei, Abdul Razak, Bushroa, Wong, Yew Hoong
• Format: Article
• Published: Bentham Science Publishers 2022
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.um.edu.my/41798/

Physical vapor deposition (PVD) is a thin film fabrication process in the semiconductor industry. This review paper discusses the different types of PVD methods such as sputtering, cathodic arc deposition, pulsed laser deposition, and ion plating that could be employed in order to fabricate nanoscal...