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Dynamic dispersing technique for PR coating process in planar lightwave circuit fabrication

A new dynamic dispersing technique (DDT) is proposed and demonstrated to improve the photoresist (PR) coating process in planar lightwave circuit (PLC) fabrication. In this technique, the PR is dispensed during the wafer's spin cycle on the spin coaler instead of the conventional static dispens...

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书目详细资料
Main Authors:	Pua, Chang Hong, Harun, Sulaiman Wadi, Chong, Wu Yi, Jayapalan, Kanesh Kumar, Ahmad, Harith
格式:	Article
出版:	John Wiley & Sons 2007
主题:	Q Science (General) QC Physics TK Electrical engineering. Electronics Nuclear engineering
在线阅读:	http://eprints.um.edu.my/19681/ http://dx.doi.org/10.1002/mop.22609
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