Dynamic dispersing technique for PR coating process in planar lightwave circuit fabrication

• Main Authors: Pua, Chang Hong, Harun, Sulaiman Wadi, Chong, Wu Yi, Jayapalan, Kanesh Kumar, Ahmad, Harith
• Format: Article
• Published: John Wiley & Sons 2007
• Subjects: Q Science (General); QC Physics; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/19681/; http://dx.doi.org/10.1002/mop.22609

A new dynamic dispersing technique (DDT) is proposed and demonstrated to improve the photoresist (PR) coating process in planar lightwave circuit (PLC) fabrication. In this technique, the PR is dispensed during the wafer's spin cycle on the spin coaler instead of the conventional static dispens...