Flip-chip bonding fabrication technique
Military systems, outer space exploration and even in medical diagnosis and treatment used magnetic field detection. Low magnetic field detection is particularly important in tracking of magnetic. Traditional magnetometer tends to be bulky that hinders its inclusion into micro-scaled environment....
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| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English English |
| Published: |
IOP Publishing
2017
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/59213/1/ICOM%2717%20_%20IOP%20Published_%20Afif.pdf http://irep.iium.edu.my/59213/12/59213_Flip-Chip%20Bonding%20Fabrication%20Technique_scopus.pdf http://irep.iium.edu.my/59213/ http://iopscience.iop.org/article/10.1088/1757-899X/260/1/012005 |
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| Summary: | Military systems, outer space exploration and even in medical diagnosis and treatment
used magnetic field detection. Low magnetic field detection is particularly important in
tracking of magnetic. Traditional magnetometer tends to be bulky that hinders its inclusion
into micro-scaled environment. This concern has brought the magnetometer into the trend
of device miniaturization. Miniaturized magnetometer is usually fabricated using
conventional microfabrication method particularly surface micromachining in which
micro structures are built level by level starting from the surface of substrates upwards
until completion of final structure. Although the miniaturization of magnetometer has been
widely researched and studied, the process however is not. Thus, the process governing the
fabrication technique is studied in this paper. Conventional method of fabrication is known
as surface micromachining. Besides time consuming, this method requires many
consecutive steps in fabrication process and careful alignment of patterns on every layer
which increase the complexity. Hence, studies are done to improve time consuming and
reliability of the microfabrication process. The objective of this research includes designing
micro scale magnetometer and complete device fabrication processes. A micro-scale search
coil magnetometer of 15 windings with 600μm thickness of wire and 300μm distance
between each wire has been designed. |
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