Mechanical behavior of an electrostatically actuated micropump

• Main Authors: Faris, Waleed Fekry, Abdel-Rahman, Eihab M., Nayfeh, Ali H.
• Format: Conference or Workshop Item
• Language: English
• Published: 2002
• Subjects: T Technology (General); T351 Mechanical drawing. Engineering graphics; TJ Mechanical engineering and machinery; TJ181 Mechanical movements; TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General)
• Online Access: http://irep.iium.edu.my/49864/3/49864-new.pdf; http://irep.iium.edu.my/49864/; http://dx.doi.org/10.2514/6.2002-1303

We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the e...