Design and simulation of 10 MHz MEMS oscillator
Design and analysis of a 10MHz oscillator is presented. To perform oscillator circuit simulations, the CMOS-MEMS Clamped-Clamped beam) resonator structure is modeled using its RLC equivalent circuit approach. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with an...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2014
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/39245/1/06860920.pdf http://irep.iium.edu.my/39245/ http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6860920 |
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| Summary: | Design and analysis of a 10MHz oscillator is presented. To perform oscillator circuit simulations, the CMOS-MEMS Clamped-Clamped beam) resonator structure is modeled using its RLC equivalent circuit approach. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with an amplifier circuit. The OP AMP achieves a gain of 1.8 V and VSS of -1.8 V. The two-stage CMOS OP AMP is combined with 10MHz CC-beam resonator to create and oscillator at the frequency of ~10MHz with loop gain of 16 dB.The oscillator is simulated using Cadence Design Systems.
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