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RF CMOS-MEMS cantilever resonator

This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. Th...

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Main Authors: Zainuddin, Ahmad Anwar, Karim, Jamilah, Nordin, Anis Nurashikin, Taufik, Mohamad Syamsi, Pandian, Mohanraj, Khan, Sheroz
Format: Conference or Workshop Item
Language:English
Published: 2013
Subjects:
TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:http://irep.iium.edu.my/36871/1/06717939.pdf
http://irep.iium.edu.my/36871/
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6717939
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spelling my.iium.irep.368712016-06-05T07:22:36Z http://irep.iium.edu.my/36871/ RF CMOS-MEMS cantilever resonator Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Taufik, Mohamad Syamsi Pandian, Mohanraj Khan, Sheroz TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000. 2013-11 Conference or Workshop Item REM application/pdf en http://irep.iium.edu.my/36871/1/06717939.pdf Zainuddin, Ahmad Anwar and Karim, Jamilah and Nordin, Anis Nurashikin and Taufik, Mohamad Syamsi and Pandian, Mohanraj and Khan, Sheroz (2013) RF CMOS-MEMS cantilever resonator. In: 2013 IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA), 26-27 Nov 2013, Kuala Lumpur. http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6717939
institution Universiti Islam Antarabangsa Malaysia
building IIUM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider International Islamic University Malaysia
content_source IIUM Repository (IREP)
url_provider http://irep.iium.edu.my/
language English
topic TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
spellingShingle TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Zainuddin, Ahmad Anwar
Karim, Jamilah
Nordin, Anis Nurashikin
Taufik, Mohamad Syamsi
Pandian, Mohanraj
Khan, Sheroz
RF CMOS-MEMS cantilever resonator
description This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000.
format Conference or Workshop Item
author Zainuddin, Ahmad Anwar
Karim, Jamilah
Nordin, Anis Nurashikin
Taufik, Mohamad Syamsi
Pandian, Mohanraj
Khan, Sheroz
author_facet Zainuddin, Ahmad Anwar
Karim, Jamilah
Nordin, Anis Nurashikin
Taufik, Mohamad Syamsi
Pandian, Mohanraj
Khan, Sheroz
author_sort Zainuddin, Ahmad Anwar
title RF CMOS-MEMS cantilever resonator
title_short RF CMOS-MEMS cantilever resonator
title_full RF CMOS-MEMS cantilever resonator
title_fullStr RF CMOS-MEMS cantilever resonator
title_full_unstemmed RF CMOS-MEMS cantilever resonator
title_sort rf cmos-mems cantilever resonator
publishDate 2013
url http://irep.iium.edu.my/36871/1/06717939.pdf
http://irep.iium.edu.my/36871/
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6717939
_version_ 1643611087082356736
score 13.160551

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