A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the...
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| Main Authors: | , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf http://irep.iium.edu.my/30772/ http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=1620891&queryText%3DA+comparison+between+two+solution+approaches+for+diaphragmbased+capacitive+pressure+microsensor |
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