A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor

• Main Authors: Faris, Waleed Fekry, Mohammed, Hazem
• Format: Conference or Workshop Item
• Language: English
• Published: 2004
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf; http://irep.iium.edu.my/30772/; http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=1620891&queryText%3DA+comparison+between+two+solution+approaches+for+diaphragmbased+capacitive+pressure+microsensor

We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the pull-in value of the capacitance vary widely between the two approaches almost 40 percent increase in the second method. Also, central deflection at which the pull-in takes place is different between the two methods